Is anyone aware of foudries or research labs with dry etch process for PZT/PLZT
films ?

Thanks,
--Kris

Kris Vossough, Ph.D.
Nano and Micro Technology Consultants
E-mail: vossough@memswork.net
Voice: (408)373-5413
Fax: (650)798-5001
http://www.memswork.net