Hi, I would like to perform dry etching of SiO2 (on Si surface) finishing with H-terminated Si surface. What kind of plasma should be applied at the end of the process to obtain a reduced silicon surface? Is it possible at all to substitute an aqueous HF etching by the plasma process? I will be grateful for any help. Thanking you in advance, Best regards, Dr. Jolanta Kurz Fachhochschule Nordwestschweiz Hochschule für Life Sciences Institut für Chemie und Bioanalytik Gründenstrasse 40 CH - 4132 Muttenz T +41 61 467 44 67 F +41 61 467 44 57 jolanta.kurz@fhnw.ch www.fhnw.ch/lifesciences