Daven- I was not aware that tools allow for thermo-viscoelastic damping analysis. Please elaborate. So while I am not a user of ANSYS, but of ABAQUS, my understanding of FEM tools for MEMS and large-aspect-ratio elements would lead me to suggest selecting one of the following options: * Use six-sided bricks (quadrilateral surfaces) for meshing. Consider using either a structured mesh, or an extruded quadrilateral mesh. You may need to simplify your meshed geometry to approximate curved surfaces with 90 degrees corners, etc. * Separate your thermal analysis from your piezoelectric analysis from your damping analysis, or some fraction thereof except where coupling is essential. If you absolutely must have all three, then you will likely deal with convergence problems and more issues with mesh compatability for all three. * For your thermal analysis (only) you may be able to use a much thicker layer of gold (assuming you have large lateral distances compared to thickness) by reducing gold's bulk thermal conductivity proportionately. This will give you the profile of the thermal gradients within the multilayer structure. You should not have to change the natural convective surface coefficients. -- Raj Gupta, Owner Volant Technologies, Inc. San Francisco, CA http://terahz.org ----- Original Message ---- From: daven chouTo: mems-talk@memsnet.org Sent: Wednesday, November 26, 2008 8:53:16 AM Subject: [mems-talk] problems about the thermo-piezoelectric ansys of quartz beam Dear everyone: I am using the finite element analysis to calculate the quality factor of quart resonating beam accerometer. But I've got a puzzle: how to take piezoelectricity and electrodes into account. The thermal conductivity of gold is larger than that of quartz. so,the piezoelectricity and thermal conduct of the electrodes will affect the temperature gradient in the beam. I used the ansys as the FEA tools to do this job. The beam is quartz,and solid226 is used to mesh the beam. The electrodes deposited on the beam is about 3000 A, which is beyond the the thickness of the beam. If i use the 3-D solid to model the electrodes, the elements are so large that the computer can't resolve it. I haved tried to use plane223 to model the electrodes,but i don't know how to deal the link between electrodes and the surface of the beam. Is there anyone who has tactics to solve the problem. I am looking forward to your answer. thanks a lot in advance. my english is poor, and i don't know whether i have described the problem clearly. sincerely yours, jianfa zhou ps. the error code of ansys hint *** ERROR *** CP = 53.719 TIME= 14:46:01 There are elements with negative electric charge and current conduction reaction solutions for the VOLT degree of freedom in the model. This analysis is not valid. ps.brief codes of ansys /prep7 ..... et,1,226,1011 et,2,223,110, mp ........ !define meterial properties !creat models block,.....!model the beam k,,... a,..... !model the electrodes aovl,....!overlap the electrodes and the surface of the beam !mesh the models type,1 mat,1 .......!mesh the beam ....... type,2 mat,2 ........!mesh the electrodes ........ !apply boundary conditions ..........!clamped-clamped beam ..........!apply voltage conditions fini !solve the problems ...... .......