Hello! I'm looking for a cost effective method to create a mask with feature size of about 0.2~0.5 um. Would a chrome mask do the job? Also, the channel depth I'm trying to fabricate is around 2~5 um, which is approximately 10 times larger than the width of the channel. With the appropriate mask, would I be able to fabricate the channel using soft lithography? (I have access to contact mode lithography equipment) Thank you!