Hi Andrea, Try AZ9260, it performs better than AZ4562 and 4620 for a layer thicker than 10um. I got thickness from 5um to 30um. But the uniformity is not perfect when you are dealing with a very thick layer. And the pattern would be slightly larger than your mask since you have to over expose your wafer. Good luck. Fei 2008/12/20, Andrea Mazzolari: > Hello all, > i need to spin and pattern a 10um thick S1813 photoresist. I've searched > for optimal parameters in the S1813 datasheet but could not find anything > which could help in this direction. > Is there someone who already have done this ? > > If it is not possible to achieve such thick S1813 layer, are there other > photoresists which can provide this thickness and that are compatible with > a bosch process ? > > Best regards, > Andrea Fei Wang Postdoctoral researcher, Dr MIC - Department of Micro and Nanotechnology Technical University of Denmark (DTU) Building 344, 1st floor, Room no. 130 DK-2800, Kgs. Lyngby Denmark Tel: +45 4525 6311 Fax: +45 4588 7762 Email: fei.wang@nanotech.dtu.dk http://www.nanotech.dtu.dk