durusmail: mems-talk: XeF2 source
XeF2 source
2009-01-07
2009-01-07
XeF2 source
Taekyung Kim
2009-01-07
 Hi all,

I am wondering if anybody knows a XeF2 source vendor.
I'd like to build a XeF2 etching system in my lab, but I can't find a vendor
of XeF2 source.

Thank you very much in advance.

TK
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