Hi all, I would like to know if anyone has a procedure for developing a lift-off recipe for 3000 PY and patterning with 1813 photoresists using conventional lithography techniques. The datasheets usually specify a given soft and hard bake temperature and duration as well as spin speed and duration of spinning for a given resist but I would like to know how to verify the exposure and developing times. Is there any procedure out there thay may apply to transparent substrates too? Maybe there are some patterns that are specifically used for this and some features that can be tracked under the microscope to verify if there is over or under development or over or under exposure. How does one discern the over development from over exposure ....etc. EVELYN BENABE Graduate Research Assistant RF Microsystems Research Group University of South Florida 4202 East Fowler Avenue Tampa, FL 33620 Office: ENB 412 Office Phone: (813)-974-4851 Email: benabe@mail.usf.edu