Dear Ananth, I appreciate your help. 1. Yes we have oven, and i will try your suggestions as soon as possible. 2. Is this post bake condition damage to futures? (future size is 300nm.) 3. I make deposition step by step like your suggestion. Exm: 500A deposition - 5min cooling time (rate:3A/sec.) I think these conditions are not enough for cooling of samples? Best regards.