Hello:

I need your help. What is the formula you use to calculate your PR thickness
uniformity across the wafer? Where is the reference or source for this, is
it ANSI standard calculation or SEMI standard calculation? Can you please
help me site the source? I'm having an argument with few people how to
calculate it. What is the industry standard and where can I find that source
to calcualte it.

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Thank You Very Much,
GQ Chu