Have you tried a hard bake prior to SiO2 etch? Ed -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Taekyung Kim Sent: Friday, January 30, 2009 11:11 AM To: mems-talk@memsnet.org Subject: [mems-talk] PMMA or ZEP resist adhesing promotion Hi folks, I have an adhesion issue with PMMA. PMMA 495 C4 was spun on a thermal oxide substrate and after e-beam lithography, 6 um x 10 um window was opened. Instead of dry etching, I wanted to wet etch SiO2 (~50nm thick) with 1:6 BOE (etch rate ~90 nm/min).But the problem is after wet etching and PMMA removal, the pattern is no longer rectangle. It's close to an oval shape. I think it's because the adhesion of PMMA layer to the substrate is not goo. Is there any way to improve adhesion? What if I use ZEP resist? Is there a way to improve ZEP adhesion to SiO2 substrate? Thanks TK