I have been using MgO wafers for some time and have noticed that if you
leave them unused for a while they no longer look clean.  I have tried
cleaning them in an ultrasound bath using acetone and methanol but that does
not remove whatever is on the surface.  Since the wafers have not been
processed I am assuming that what I see is oxidation on the surface and not
resist.  Does anyone know of a way of cleaning what seems to be a native
oxide on MgO?  I tried dipping the wafer on 10:1 BOE for ~ 2 minutes but
that did not make a difference.


EVELYN BENABE
Graduate Research Assistant
RF Microsystems Research Group
University of South Florida
4202 East Fowler Avenue
Tampa, FL 33620
Office: ENB 412
Office Phone: (813)-974-4851
Email: benabe@mail.usf.edu