durusmail: mems-talk: Temperture Measurement and gas flow device
Temperture Measurement and gas flow device
1998-09-22
Temperture Measurement and gas flow device
BURKE, JOHN
1998-09-22
Is anyone developing a micro temperaturesensor which incorporates the
flow (local atmosphere) of thermallly conductive gases (i.e He)?

Thanks,
John Burke
EATON Corporation


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