durusmail: mems-talk: pattern on 3by3mm Si Chip
pattern on 3by3mm Si Chip
2009-02-11
2009-02-11
2009-02-11
2009-02-12
pattern on 3by3mm Si Chip
LIN LI
2009-02-11
Hi,

Is there a good way to spin coat Photoresist and pattern the metal on a just
3by3 silicon chip?
I'm having difficulty in getting uniform coating on the small chip.

Thanks.

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Lin Li
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