durusmail: mems-talk: E-beam direct patterning of SAM layer on ITO coated glass substrates
E-beam direct patterning of SAM layer on ITO coated glass substrates
2009-02-12
E-beam direct patterning of SAM layer on ITO coated glass substrates
li shifeng
2009-02-12
Hi, All

I've read literature that talks about E-beam direct patterning of SAM layer on
the silicon substrates. I am just wondering if I can do similar patterning on
the ITO coated glass substrates.

Has anyone done similar research or have any comments?

Thanks!
shifeng
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