There should be plenty of good literature on micromirror simulation.  You have
to dig back a few years.  Here are few that are publicly accessible
(http://www.google.com/search?q=micromirror+simulation)

http://www.ansys.com/industries/mems/mems-downloads/msm99_cnrs_umirror.pdf
http://www.ece.ucsb.edu/uoeg/publications/papers/todd05omems.pdf
http://terahz.org/_html/18SampledStudies.html
http://piers.mit.edu/piersproceedings/download.php?file=cGllcnMyMDA4aGFuZ3pob3V8
NEExYl8wOTIyLnBkZnwwNzExMDkwMjE3Mzk=

A forum dedicated to simulation is at mems-modsim@memsnet.org, but it is used
infrequently.

Good luck.



----- Original Message ----
From: aravind samy 
To: mems-talk@memsnet.org
Sent: Friday, February 27, 2009 5:29:29 AM
Subject: [mems-talk] Forum for Mems related simulations

Hi everyone,

I am working in micromirror field and more towards design and simulaion. I
joined this group to get updated in my area and also to share my ideas to
others. But so far I have very rarely come across any postings towards the field
of simulation. It'd be of great help if you people can share any of the forum
which relates to simulation related stuff..

Thanks in advance.

Best Regards,

Aravind.