It's pretty difficult to get a layer that thick, but first off it will depend on the SU8 you are using. In order to achieve thicknesses in that range you will be best served using SU8 2100 or 2150. These are very viscous and dispensing them can be problematic. In addition you will have to do a multilayer process. For example using 2150 at a spin speed of 1000 rpm will give you around 650 um. To achieve a 2 mm layer it will require 3+ layers. After each layer you will have to do a soft bake, but beware of over baking the under layers during the 2nd and 3rd bakes. If you put too much heat into them it can cause a sort of thermal crosslink which will inhibit you from being able to fully develop away the material. I would do shorter bake times on the under layers, just enough to drive a good majority of the solvent out, leaving the film firm but still a bit tacky to the touch! Good Luck! Best Regards, Mike Sexton EV Group invent * innovate * implement Process Technology Engineer - Direct: +1 (480) 305 2450, Main: +1 (480) 305 2400 Fax: +1 (480) 305 2401 Cell: +1 (602) 625 1275 E-Mail: M.Sexton@EVGroup.com, Web: www.EVGroup.com -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of A. AhmadShukri Sent: Wednesday, November 26, 2008 12:31 PM To: General MEMS discussion Subject: [mems-talk] very thick layer of SU-8 Hi all-- I am wondering if anyone knows how I can deposit a 2mm (yes, 2,00um) layer of SU-8 and pattern it. Thanks, Aimi Ahmad-Shukri Dept of Mechanical Engineering University of Washington