Ghazal,

I bounce a HeNe laser off my sample and it reflects on to a photo
detector which is connected to a strip chart recorder.  The laser and
detector are outside the chamber.

Brent
>> Dear MEMS colleagues.
>>
>> I am curious to find a way to monitor the etch rate of my sample inside an
>> RIE machine.
>> Now I have heard of CCDs (used for SEM), but I am not sure whether the
>> plasma inside the chamber and the gases would affect the CCD.
>> Does anybody know what would happen if a CCD is placed in plasma?
>>
>> Regards.
>>
>> Ghazal Hakemi
>> PhD student
>> Cranfield University
>> MK43 0AL   U.K.
>>
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