durusmail: mems-talk: Sputtering Pyrex
Sputtering Pyrex
2009-03-11
2009-03-11
Sputtering Pyrex
Brent Garber
2009-03-11
Jim,

I did it all the time using a RF magnetron sputtering system.

Brent

Jim Pappas wrote:
> I would like to sputter Pyrex (borosilicate glass). Has anyone tried
> this before? If so, what conditions have you tried?
>
> Thanks,
> Jim
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