Hello Du, Do you only encounter this arcing issue when running the microscope in environmental SEM mode? If so, it probably means your chamber pressure is too high and the water vapor (or whatever gas you're flowing) is ionizing. Try reducing the pressure in your chamber. Good luck, Brian C. Stahl Graduate Student Researcher UCSB Materials Research Laboratory brian.stahl@gmail.com / bstahl@mrl.ucsb.edu Cell: (805) 748-5839 Office: MRL 3117A On Wed, Mar 11, 2009 at 3:30 PM, Qinghong Duwrote: > Hi, > > We have a Philips XL30 ESEM system. Recently, the system only can work > under 10kV. Over 10kV, there is arching issue in the HTSU unit. Does anybody > have this experience and any idea to fix it? > > Thanks a lot. > > Du