If your softbake goes right, SU-8 should not stick to the film. I worked on
SU8 with the same method but I used flood exposure tool where I had to put a
quartz plate on the film (to keep wafer and film intact) and expose.


Regards,
Pavan

On Mon, Mar 16, 2009 at 5:36 AM, 郑瑞麟(Ruilin Zheng) wrote:

> Hello,
>
> I just bought some plastic mask, and I attached them onto a glass plate.
> I want to use these mask for contact lithography on SU-8 layer.
> I am wondering if the SU-8 layer would stick to the plastic mask after
> exposure. Or should I use the opposite side of the mask (i.e. glass plate)
> for contact with SU-8 layer?
>
> But in this way, the lithography won't be the contact one.
> Does anyone has that experience? Please give me some advices.

--
Pavan Samudrala
300 South Central Avenue, Apt A38
Hartsdale, NY 10530
email:pavan.samudrala@gmail.com