There are a ton of recipes with H2SO4:H2O2: H2O 8:1:1 5:1:1 3:1:1 This family will barely etch the InP at all It also works fine with InGaAsP James -----Original Message----- From: weiquan yang [mailto:quanwy@gmail.com] Sent: Tuesday, March 17, 2009 4:30 PM To: mems-talk@memsnet.org Subject: [mems-talk] selective etching InGaAs to InP Hi, all. Do you know a wet InGaAs etchant with high selectivity to InP. I etched InGaAs using InP as the mask. Because the InP is useful for our final device, I looked for the solution with high selective etching InGaAs to InP.The etching rate to InGaAs should be as big as possible, and the etching rate to InP should be as small as possible. I tried HF+H2O2. the selectivity is kind of OK, however it will react with SiO2, which is a useful layer in our device. I also tried C6H8O7+H2O2. The etching rate to InGaAs is not fast enough. Are there people who have experience in InGaAs and InP? Pls give me some advice. Thanks a lot.