Hello all.

I have PMMA pattern over the quarz substrate, which have been done by 3D EBL
patterning. The shape of pattern is like the spherical lens, 1,5 um high and 200
um in diameter. I need to transfer it to quarz substrate. I have an access to
RIE machine with parralel plate reactor. There are two most important factors of
task to be done: a) refine etching recipie to have equal etching rate of PMMA
and quarz; b) have as smooth surface of the quarz lens after the etch as
possible.

Does anybody have any suggestions abot most suitable recipie for that?

Thanks in advance.

Darius