durusmail: mems-talk: KOH - backside etch - frontside protection
KOH - backside etch - frontside protection
2009-03-23
2009-03-24
2009-03-24
KOH - backside etch - frontside protection
Chris P. Park
2009-03-24
Hi Andrea,

thanks for your recommendation, I will go along the mechanical wafer support
path, yet I received the information about a commercial solution which also
allows for built in light source. They do basically what you suggested but their
setup is made from PEEK and comes optinally with backside window or a light
source (LED's) inside.

Thanks for your help.

Chris.
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