Nothing can chemically dissolve SU-8. I believe the remover works by causing
the SU-8 to swell and delaminate which seems to be what it has done (at
least partially).
Depending on what you are doing, you may like to consider a release layer
(e.g. Omnicoat) which will facilitate easy and complete removal of the SU-8
layer after processing.


2009/3/30 郑瑞麟(Ruilin Zheng) 

> Hello, everyone,
> I met the problem when dealing with removal of cured SU-8 with Remover PG..
>
> both SU-8 photoresist (2150) and remover are product of Microchem.
>
> The thickness of SU-8 layer is about 400 microns.
>
> I put the substrate with cured SU-8 , into a petri dish filled with
> remover,
> then ultrasonic with heating (60-70 centigrade degree) was applied, lasting
> 1hour.
> After repeating this twice or three times, some part of SU-8 layer was
> delaminated, but no sign of dissolution of cured SU-8 was found.
>
> Does anyone have any idea about this problem? Please give me some advice.