Hi Andrea, I am also interested in that resist from Shim-Etsu, I think I read
here about it a few weeks ago, and then I have found some info about it. Here
you have a link that might be useful:
http://www.ultratech.com/pdf/05/SPIE_05_ShinEtsu_300mm_Paper.pdf
Warren W. Flack, Ha-Ai Nguyen(1), Elliott Capsuto(2), Kelly Abreau(3),
Characterization of 100 Micron Thick Positive Photoresist on 300 mm Wafers
(1)Ultratech, Inc.San Jose, CA 95134, (2)Shin-Etsu MicroSi, Inc.Phoenix, AZ
85044,(3)STEAG Hamatech USA Santa Clara, CA 95051
Regards.



--- Den tors 2009-04-23 skrev Andrea Mazzolari :

Från: Andrea Mazzolari 
Ämne: [mems-talk] about photoresist SIPR-7126M-20
Till: mems-talk@memsnet.org
Datum: torsdag 23 april 2009 10.39

Hi All,

i need to spin a photoresist with thinckness of about 80-100um.
I'm trying to use SIPR-7126M-20 from Shin Etsu Microsi. Is there anyone with
experience with this photoresist who could give some suggestions ?

Thanks,
Andrea