Hi

We have been using Crystalbongd555 wax all the time for the attachment
of small samples. By reflowing the wax, you can make sure that an
intimate contact is made between the sample and carrier wafer.

Best
Leo


On Sat, Apr 25, 2009 at 2:25 PM, Alexandre Boe
 wrote:
> Hi,
>
> I had the same troubles with ICP etching and grease. The first idea was to
> carefully clean the substrates with hot piranha, in some case it works.
>
> You can also get rid of the grease and stick your wafer directly on the
> carrier one using the photoresit and try to lower the backside
> temperature. I had also tried not to stick the two wafers, but simply put
> them into conctact, if you are not afraid about opening your chamber to
> take back the wafers in case of sliding.
>
> Alexandre

--
Xiaoguang "Leo" Liu
Birck Nanotechnology Center,
Purdue University,
1205 W.State Street, West Lafayette, IN, 47906 USA
liu79@purdue.edu