durusmail: mems-talk: Silicon wet etch with resistivity > 20,000 Ohm/Cm
Silicon wet etch with resistivity > 20,000 Ohm/Cm
2009-06-07
2009-06-07
Silicon wet etch with resistivity > 20,000 Ohm/Cm
Moshe
2009-06-07
Hello
I want to etch Silicon 100 with resistivity > 20,000 Ohm/cm
Is it possible to etch this Silicon type  with KO  solution ?
If yes,
What is the etch rate ?
Can the fabricate  is V groove ?

Thank You, Moshe




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