Hi Li,

http://lab.gotfork.net/index.php?title=NR9-1500PY_process should be an
OK starting point, you may need to increase bake times slightly for
glass - this recipe is designed for double-layer Si wafers.

-Alex

li shifeng wrote:
> Hi, All,
>
> I am using NR9-1500PY to make 1 micron features on the glass substrate.
> I am looking for some reliable recipes to start as my baseline. Thanks!