durusmail: mems-talk: PDMS - Kapton bonding
PDMS - Kapton bonding
2009-06-10
PDMS - Kapton bonding
Harsh Sundani
2009-06-10
Hi,

I am trying to bond Kapton film to PDMS layer (spun on a Si wafer). The film
bonds well to the PDMS layer. However, it starts coming off when treated with
acetone and IPA ( in an ultrasonic tank) for around 15 min.  Could anyone
suggest a way to increase the adhesion between PDMS and the Kapton film, so that
it can be treated with IPA and acetone without damaging the bonding?

PS: The PDMS layer was cured at 100 C for 60 min.

Thank you.

Regards,
Harsh.D.Sundani
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