durusmail: mems-talk: problem with DRIE
problem with DRIE
problem with DRIE
Karolina psychowlosy
2009-06-11
Hello,

 try with 150 W and 100 uBa. Normally to ash 1.5 um of positive PR series
S18xx takes about 10 minutes.

Best Regards.

  Karolina Laszczyk

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