I need an estimate of Young's modulus (E) and the coefficient of thermal expansion (CTE) of Novolac based positive PR films of thickness 3-10 um. The AZ9000 series PR would be a good example. In particular I need an estimate for such films after softbake (90-100C) and also after mild hard bake (around 115-120C). The estimate can be very approximate. If you know some values or could point me to a reference with this information, I would be grateful. Thanks - Don Friedrich JDSU - Applied Optical Technologies Santa Rosa, CA Don.friedrich@jdsu.com