durusmail: mems-talk: wafer bonding warpage
wafer bonding warpage
2009-06-27
2009-06-28
2009-06-30
wafer bonding warpage
杜 彦召
2009-06-27
Hi all:
i am bonding one glass wafer and one silicon wafer with epoxy and their TEC is
the same. But why does it have near 500um warpage after bonding?

Thank you!

Andrew Du
reply