Hi, You can try photosensitive permanent polyimides: HD8820 (HDMicrosystem) or AP2210 (Fujifilm) They are quite similar products (gamma-butyrolactone formulation) that can be exposed both in broad-band or i-line and are developable after exposure in TMAH solutions. Regards Noemi -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of dai truong Sent: Wednesday, July 08, 2009 11:10 AM To: General MEMS discussion Subject: [mems-talk] Polyimide information Hi all, I want to use polyimide as an dielectric layer in III-V devices. So I am going to find out which polyimide photoresist is good. But I only can get information about SU-8, and cannot find out any others (e.g. probimide,...). are there anyone know where there are information about polyimide? Thank you very much!