If it's for evaporation of sputtering, don't touch it!

shay

-----Original Message-----
From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]
On Behalf Of Nataraj
Sent: Friday, July 10, 2009 3:17 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] Frequency for changing Oil in Oil Diffusion Pumps

Dear All,

Can any one advise me, what is the frequency for changing the Oil
in Oil diffusion pumps?  Is it time based or does it depend on the
utilization of the machines.

Regards,

Nataraj Santhanam
Sputtering Section