durusmail: mems-talk: How to avoid pinholes in the sputtered Aluminum layer
How to avoid pinholes in the sputtered Aluminum layer
2009-07-15
How to avoid pinholes in the sputtered Aluminum layer
Nataraj
2009-07-15
Dear All,

             I need your help and suggestions to reduce or make the sputtered
Aluminum layer free from Pinholes, Currently I am trying to sputter Aluminum
layer on Polycarbonate based sheets, also  I am using DC pulsed power supply
for this process ( Frequency is 65 KHz ).

Your suggestions please.

Regards,

Nataraj Santhanam
Sputtering Section
reply