Try a HMDS treatment on your silicon wafer just before coating it with PDMS. This way I was able to peel (with a lot of practice) wafer size layers of PDMS with thicknesses from 10 to 50 microns. Regards, Sebastian Sosin -----Original Message----- From: Shah, Forum N [mailto:forum@exchange.uta.edu] Sent: Thursday, July 23, 2009 10:54 PM To: mems-talk@memsnet.org Subject: [mems-talk] How to peel off PDMS Hello All, I am using Jersey cote for peeling off PDMS (about 50 micron) from Silicon wafer. It is peeling off but I am not able to peel it off as a continuous intact layer. I am using a tweezer to peel it off. If someone can suggest a way to peel it off intact it would be great. Thanks in advance, Forum