durusmail: mems-talk: microfabrication of blade structures
release of metal structures and etching of stainless steel
2009-07-28
microfabrication of blade structures
microfabrication of blade structures
Robert MacDonald
2009-07-28
Rob,

I've had some success fabricating blades out of 100 Si using a KOH etch. This
may be a good place to start.

Rob MacDonald
Shearwater Scientific

Robert Fahey writes:

Hi All

i'm looking into possible methods of using microfabrication methods to fabricate
blade or cutting structures. I was wondering if anyone on here has any
suggestions or knows of any similar work that has been carried out in the past?

I was thinking of using KOH etching of <100> Si wafers and use the natural
54.7degree angle as a cutting edge. Can I treat the Si in any way to make the
cutting edge harder? Does anyone have any experience on the use of silicon
carbide/tungsten carbide/similar materials for hardening purposes?

Does anyone have any other suggestions? I would also be keen to explore options
in metals.

thanks
Rob
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