Does anyone have a part number (or filter material and pore size) for a
syringe filter that they have used with S1800 series photoresist with some
success? I know the filters need to be a solvent compatible filter, and
probably the easiest place to buy them from would be either millipore or
VWR. I am just not sure which material wets best with photoresist (polypro,
nylon, teflon, hydrophillic teflon) and what pore size give reasonable
dispensing without having to stand on the syringe. Also, if anyone has a
suggestion for a compatible syringe, that would be helpful as well. I am
trying to limit places for contamination, and am trying to move away from
using unfiltered glass syringes to dispense photoresist.

Thanks,
David Casale