Hi all,

           Thanks a lot for giving a very useful suggestion. I cleaned my
samples using Piranha solution  and baked it for 30 minutes at 200 degrees as
suggested by you. Now the PR stuck on the sample and I could use the same for
further processes. Thanks all who helped me to get rid off this.

Renil

--- On Fri, 14/8/09, Shao Guocheng  wrote:

From: Shao Guocheng 
Subject: Re: [mems-talk] peeling of AZ5214E
To: "General MEMS discussion" 
Date: Friday, 14 August, 2009, 9:55 AM

Hi, Renil,

    As others have suggested, you need to make sure ur wafer is clean and HDMS
coating can also help. But the first thing you can try next time is to bake your
wafer at 200C for 30min before spincoat to have a good dehydration.


Shao