If you are looking to preserve aluminum while etching silicon XeF2 would be the
chemical of choice. However it is an isotropic etch so you would need to switch
to a front side etch strategy.

If you have any questions please feel free to contact me.

David Springer
XACTIX, Inc.
2403 Sidney St.
Suite 300
Pittsburgh, PA 15203
Tel: +1 412 381 3195


> Maybe you can use Ti/Au wires instead of Al and etch the silicon by TMAH.
> It works well in  our experiment.