The best source that I have found so far is the following
paper
"Temperature dependent emissivity of Silicon related materials
and structures", IEEE trans. on semiconductor manufacturing,
Vol 11, No. 1, Feb. 1998.

If there are other comprehensive ones, I would like to hear
about those too...

Cheers,
Ram
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  Ram N. Ramanan, Ph.D.               FSI International
  Microlithography,  R&D              MS 5-7060, 600 Millennium Dr.
  Ph: 972-643-2213                    Allen, TX-75013
  Email: nramanan@fsi-intl.com        www: http://www.fsi-intl.com
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