Look up references by Steve Quake at Stanford:

http://thebigone.stanford.edu/

---
Albert K. Henning, PhD
Director of MEMS Technology
NanoInk, Inc.
215 E. Hacienda Avenue
Campbell, CA  95008
408-379-9069  ext 101
ahenning@nanoink.net


-----Original Message-----
From: dll [mailto:dll08@mails.tsinghua.edu.cn]
Sent: Tuesday, October 06, 2009 7:50 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] PDMS membrane

Does anyone know how to make a PDMS membrane (about 50-100 um) rigid
enough to be a valve?

Thanks a lot!