Hi all, I have to track the crystallographic changes of BST films on both single crystal and polycrystalline wafers as a function of annealing. I was planning on using normal XRD theta-2theta scans for the single crystal wafer as I don't expect that much change in the orientation of the crystal in the single crystal as a function of annealing. For the polycrystalline film, I was planning on using a Grazing Incidence XRD method since the normal XRD method will yield very low intensity peaks for my film on Alumina. However, I have been told that when polycrystalline films are annealed, the position/orientation of a given grain may change and the maximum intensity location may change making it hard to track the maximum intensity as a function of annealing. The same person recommended the use of texture scans for this case. Can any one comment on this? Does any one have a procedure for doing a texture scan? If so, what is the advantage? Any reference material will be greatly appreciated. -- EVELYN BENABE Graduate Research Assistant RF Microsystems Research Group University of South Florida 4202 East Fowler Avenue Tampa, FL 33620 Office: ENB 412 Office Phone: (813)-974-4851