durusmail: mems-talk: Normal XRD or Texture XRD
Normal XRD or Texture XRD
2009-11-04
Normal XRD or Texture XRD
Evelyn B
2009-11-04
Hi all,

I have to track the crystallographic changes of BST films on both single
crystal and polycrystalline wafers as a function of annealing.  I was
planning on using normal XRD theta-2theta scans for the single crystal wafer
as I don't expect that much change in the orientation of the crystal in the
single crystal as a function of annealing.

For the polycrystalline film, I was planning on using a Grazing Incidence
XRD method since the normal XRD method will yield very low intensity peaks
for my film on Alumina.  However,  I have been told that when
polycrystalline films are annealed, the position/orientation of a given
grain may change and the maximum intensity location may change making it
hard to track the maximum intensity as a function of annealing.  The same
person recommended the use of texture scans for this case.

Can any one comment on this?  Does any one have a procedure for doing a
texture scan? If so, what is the advantage?  Any reference material will be
greatly appreciated.

--
EVELYN BENABE
Graduate Research Assistant
RF Microsystems Research Group
University of South Florida
4202 East Fowler Avenue
Tampa, FL 33620
Office: ENB 412
Office Phone: (813)-974-4851
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