durusmail: mems-talk: Negative photoresist for thickness up to 60-100um
Negative photoresist for thickness up to 60-100um
2009-11-17
Negative photoresist for thickness up to 60-100um
Paul Nguyen
2009-11-17
Hi all:
I would like to receive some technical information of Negative photoresists
which should help spin for thickness from 20-40um and upto 60-100um.  I
would also like to know how to improve adhesion of resist to metal surface.
Also, how to improve resolution of the photoresist (i.e. aspect ratio of
2:1, 4:1 or any higher).  How to purchase and qualify for these photoresists
may be very helpful.

Thanks so much in advance,
Paul Nguyen
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