durusmail: mems-talk: Aspect ratio of 4:1 or higher using BPR-100 photoresist on Metal
Aspect ratio of 4:1 or higher using BPR-100 photoresist on Metal
2009-11-18
Aspect ratio of 4:1 or higher using BPR-100 photoresist on Metal
Paul Nguyen
2009-11-18
Hello all,

Has anyone in this forum used BPR-100 Negative Photoresist (made by R&H) on
metal layer and achieved a resolution with aspect ratio of 4:1 or
higher?  Is there any issue of achieving this resolution?

Any response is appreciated.

Thanks and regards,
Paul Nguyen
reply