Depending on how thick a layer you need, you can use a bubler. Heat the water and pass O2 through it. Heat the wafer between 700-900 degrees in an oven. It's a good idea to put it in a quartz vessel/tube to prevent contamination. If you need more details let me know. Walter @elume.com ----- Original Message ----- From: "Moshe"To: Sent: Monday, November 30, 2009 4:04 AM Subject: [mems-talk] How to fabricate isolated film on silicon ? >I am looking for a way to oxidize silicon to SiO2 to get isolated film . > > A wet process also may a good process. > > Thank you, > > Moshe