Daniel, The 12%Ge/Au with a Ni layer, followed by Au sounds right (without breaking vacuum in between). Your RTA cycle seems VERY long. I go 20 seconds @ 420c Brent D.Grimm@ifw-dresden.de wrote: > Hi all, > > I am struggling a lot to obtain Ohmic contacts in a rather thin film of > medium doped 30nm GaAs / 20nm InGaAs (both 1x10^17). I guess it could be a > processing issue. > > I tried many recipes around, mostly the Au88Ge12 / Ni or Au/Ge/Ni alloy or > even evaporated as well as pressed Indium. Finally a RTA step of 3min > 420-450°C. In 99% I obtain rather high resistances, 3-6 orders of magnitude > higher then the bulk. I don't believe that this is uniquely due to surface > depletion, because in some regions (100Microns away) I obtain the low R of > the order of the bulk R. > > Does anyone have an idea of processing tricks? I tried already a HCl dip > directly prior to evaporation (no influence) and checked recently the > thicknesses of the individual metal layers. > > Any suggestions are greatly welcome. > > Daniel