I am trying to work out what you want to do. Is it lift off above each web of the membrane or is the complete membrane a base for a pattern that includes metal defined by lift off. More details please. Bill Moffat -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Xiaoyong Liu Sent: Tuesday, December 08, 2009 11:28 AM To: mems-talk@memsnet.org Subject: [mems-talk] lift off in Membrane Hi, I am trying to deposit metal on SiN membrane windows after lithography and want to perform liftoff. But seems it is very hard to remove resist enen overnight soaking in PG remover. Since membrane is only around 50 nm thick, and I can't not use ultrasonic bath because it will break membrane. I even have trouble in using N2 blow to dry membrane wafers. Does anyone have any experience how to do it on membrane? Thanks Xiaoyong