durusmail: mems-talk: fluorinated polymer for replication process
fluorinated polymer for replication process
2009-12-17
2009-12-18
fluorinated polymer for replication process
Josh
2009-12-17
Hi,

I am seeking your recommendation on fluorinated polymer for replication of
silicon structures. I haven't been involved in replication process for a
couple years and suddenly I realize it may be a good technique for my
current work. What I used is PDMS Sylgard 184 from Dow Corning. Before I
used it, I coat a layer of trichlorosilane (somewhat exotic). So it will be
easy for peeling-off.

I am thinking I may be way behind the wheel of technology and would like to
know current popular soft lithography methods. I noticed the term of
fluorinated polymer but not sure what it is. Can anybody here help? Any
literature or details of products are appreciated.

Thanks,
Josh
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