durusmail: mems-talk: e-beam resist name and company
e-beam resist name and company
2010-01-18
e-beam resist name and company
Charles
2010-01-18
Dear all,

Hi, I've just begun using e-beam lithography to build my structure.  Can anyone
suggest some e-beam resist names and companies where I can buy it?  BTW, are
there any e-beam resists with both negtive and positive properties?

Best regards.

Charles Tang
EPA Centre
Dept. of Electronic Engineering
City University of HongKong
83 Tat Chee Avenue, Kowloon, HongKong
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